Application

19622976 · METHOD FOR IMPROVED SELECTIVE ETCHING OF SILICON NITRIDE OVER SILICON OXIDE

Filed 2026-09-10 · Pending The official file ↗ · Art unit · EVONIK OPERATIONS GMBH · SMITH, GAMBRELL & RUSSELL, LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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