Application

19623687 · IN-SITU CLEANING OF A VACUUM TRANSFER MODULE END EFFECTOR

Filed 2026-09-11 · Pending The official file ↗ · Art unit · Lam Research Corporation · MUGHAL GAUDRY & FRANKLIN PC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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