Application

19624370 · DUV LIGHT SOURCE AND METHOD OF OPERATION

Filed 2026-09-15 · Pending The official file ↗ · Art unit · Cymer, LLC · ASML CIP (San Diego) / DMIPG

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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