Application

19626058 · SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

Filed 2026-09-21 · Pending The official file ↗ · Art unit · Tokyo Electron Limited · Shih IP Law Group, PLLC

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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