Application

19626627 · EDGE RING COMPENSATION MONITORING AND ADJUSTMENT DURING PLASMA PROCESSING

Filed 2026-09-22 · Pending The official file ↗ · Art unit · Lam Research Corporation · Harness, Dickey & Pierce, P.L.C. (Lam)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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