Application

19627666 · EDGE RING FOR HIGH TEMPERATURE TOLERANCE IN SUBSTRATE PROCESSING SYSTEMS

Filed 2026-09-24 · Pending The official file ↗ · Art unit · Lam Research Corporation · Harness, Dickey & Pierce, P.L.C. (Lam)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

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