Application

19628843 · MODULE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD FOR CLAMPING A SENSOR MEMBER

Filed 2026-09-28 · Pending The official file ↗ · Art unit · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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