Application

19629640 · Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus

Filed 2026-03-26 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H10P 72/722 · Mattson Technology, Inc. · Dority & Manning, P.A. and Mattson Technology, Inc

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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