Application

19629713 · ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY, AND METHOD FOR MONITORING SUCH AN ILLUMINATION OPTICAL UNIT

Filed 2026-03-26 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 7/70075 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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