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19635646 · MEMS COMPRISING A COMB DRIVE, AND METHOD FOR PRODUCING SAME

Filed 2026-03-31 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC B81B 3/004 · Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. · PVIP

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