Application

19640949 · CHARGED PARTICLE BEAM WRITING APPARATUS, DRIFT AMOUNT CALCULATION METHOD, AND CHARGED PARTICLE BEAM WRITING METHOD

Filed 2026-04-07 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/147 · NuFlare Technology, Inc. · OBLON, MCCLELLAND, MAIER & NEUSTADT, L.L.P.

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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