Application

19654589 · Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation Energy

Filed 2026-04-22 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC C23C 16/45544 · MKS Inc. · MKS Inc.

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

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