Application

19655055 · Trim And Deposition Profile Control With Multi-Zone Heated Substrate Support For Multi-Patterning Processes

Filed 2026-04-22 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H10P 72/0602 · Lam Research Corporation · Harness, Dickey & Pierce, P.L.C. (Lam)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.