Application

19663810 · ADAPTIVE OPTICAL MODULE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Filed 2026-04-30 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G02B 26/0825 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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