PATLY.AIApplication
19663981 · DRY CHAMBER CLEAN OF PHOTORESIST FILMS
Filed 2026-04-30 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G03F 7/167 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
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