PATLY.AIApplication
19667014 · METHODS FOR INHIBITING PRECURSOR INTERACTIONS DURING RADICAL-ENHANCED ATOMIC LAYER DEPOSITION
Filed 2026-05-04 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC C23C 16/45536 · LOTUS APPLIED TECHNOLOGY, LLC · Miller Nash LLP
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