Application

19679850 · ANTENNA FOR INDUCTIVELY COUPLED PLASMA EXCITATION, ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA EXCITATION, AND PLASMA PROCESSING APPARATUS

Filed 2026-05-18 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/3211 · Tokyo Electron Limited · Xsensus

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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