Application

19682043 · PLASMA PROCESSING APPARATUS

Filed 2026-05-19 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/32091 · Tokyo Electron Limited · Venjuris, P.C.

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

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