Application

19697052 · SYSTEM AND METHOD FOR INSPECTING A MASK FOR EUV LITHOGRAPHY

Filed 2026-06-03 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC G01N 21/956 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.