Application

19701907 · METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION

Filed 2026-06-09 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H01J 37/1474 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

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0 actions read

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