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19709758 · APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDUCTOR FILMS IN A SINGLE PROCESSING CHAMBER

Filed 2026-06-16 · Pending The official file ↗ · Art unit OPAP · Examiner Docket Central Easy · CPC H10P 70/12 · ASM IP Holding B.V. · Snell & Wilmer (ASM IP Holding B.V.)

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