Application

19880591 · WAFER PROCESSING CHAMBER, WAFER PROCESSING DEVICE, AND WAFER PROCESSING APPARATUS

Filed 2026-09-29 · Pending The official file ↗ · Art unit · CleanChip Technologies Limited · OSHA BERGMAN WATANABE & BURTON LLP

Office actions

first was

RCEs

no appeal

To first action

n/a

to disposition n/a

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.