PATLY.AIApplication
19881913 · CONTROL OF SPATIAL DENSITY OF PLASMA WITHIN PROCESS STATIONS BY RETURN PATH REACTANCE TUNING
Filed 2026-10-02 · Pending The official file ↗ · Art unit · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
Office actions
0
first was
RCEs
0
no appeal
To first action
n/a
to disposition n/a
Statutes raised
·
0 actions read