Application

17974019 · ELECTROSTATIC CHUCK THAT INCLUDES UPPER CERAMIC LAYER THAT INCLUDES A DIELECTRIC LAYER, AND RELATED METHODS AND STRUCTURES

Filed 2022-10-26 · Granted · Patent 12500109 (2025-12-16) The official file ↗The patent and its PDF ↗ · Art unit 2838 · Examiner Danny Nguyen Easy · CPC H10P 72/722 · ENTEGRIS, INC. · ENTEGRIS, INC./OC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

20.5 mo

to disposition 37.7 mo

Statutes raised

102 103

2 actions read

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