Application

18011062 · LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK

Filed 2022-12-16 · Granted · Patent 12387909 (2025-08-12) The official file ↗The patent and its PDF ↗ · Art unit 2838 · Examiner Kevin J Comber Easy · CPC H01J 37/32183 · Lam Research Corporation · Polygon IP, LLP / Lam Research

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

21.6 mo

to disposition 31.9 mo

Statutes raised

103 112

2 actions read

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