Application

18113941 · ELECTROSTATIC CHUCK WITH A CHARGE DISSIPATION STRUCTURE

Filed 2023-02-24 · Granted · Patent 12444636 (2025-10-14) The official file ↗The patent and its PDF ↗ · Art unit 2838 · Examiner Sreeya Sreevatsa Typical · CPC H10P 72/722 · ENTEGRIS, INC. · ENTEGRIS, INC./OC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

21.1 mo

to disposition 31.6 mo

Statutes raised

102 103 112

2 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.